| Basic | Mid | High | |
|---|---|---|---|
超纯水电阻率 | 18.25MΩNaN | 18.25MΩNaN | 18.25MΩNaN |
纯水电导率 | 1-5μs/cm | 1-5μs/cm | 1-5μs/cm |
总有机碳(TOC)(经DP--RO) | <10ppb | <5ppb | <1-3ppb |
细菌 | <1CFU/ml | <1CFU/ml | <0.1CFU/ml |
细菌内毒素 | - | - | <0.001EU/ml |
颗粒物质(0.2μm) | <1个/ml | <1个/ml | <1个/ml |
无机物离子去除率 | ≥99.5% | ≥99.5% | ≥99.5% |
重金属离子 | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb |
硅去除率 | >99% | >99% | >99% |
