书名：微机电耦合动力学
书号：978-7-118-10053-2
作者：许立忠
出版时间：2015年5月
译者：
版次：1版1次
开本：16
装帧：精装
出版基金：国防科技图书出版基金
页数：303
字数：350
中图分类：TM
丛书名：微米纳米技术丛书·MEMS 与微系统系列
定价：98.00
本书主要介绍MEMS 典型构件机电耦合及机电流体耦合动力学的相关理论与应用。全书共分12 章,主要内容包括:微机电系统及微机电系统动力学问题的发展与应用现状;静电驱动微板、微梁机电耦合动力学理论;静电驱动微板、微梁机电耦合非线性动力学理论;考虑压膜阻尼的微梁机电流体耦合动力学理论;谐振式微型压力传感器敏感性分析;静电微泵泵膜动力学、流量及结构优化分析;静电驱动微板动力学实验测试。
本书可供高等院校微电子、机电一体化等专业的师生阅读,也可作为从事微机电系统工程设计开发的研究生和科研技术人员参考。 This book mainly introduces the electromechanical coupled and electrome- chanical fluid coupled dynamics theory and application of MEMS typical micro components.There are 12 chapters in this book: Introduction, Electromechanical coupled dynamics of electrostatically driven micro - plates and micro - beams, E- lectromechanical coupled nonlinear dynamics of electrostatically driven micro - plates and micro - beams, Electromechanical fluid coupled dynamics of micro - beams considering squeeze film damping, Sensitivity about resonant pressure micro sensor, Dynamics of the electrostatic micro - pump membrane, its flow and struc- tural optimization, Dynamics test of electrostatically driven micro - plate. This book can be used as reference book for teachers, students and engineers of microelectronics, mechatronics majors, and other relevant majors.
